The latest export regulations are making it increasingly difficult for American firms and individuals to export tools and technologies capable of manufacturing logic chips with non-planar transistors on 14nm/16nm nodes and below, 3D NAND with 128 layers or more, and DRAM memory chips of 18nm half-pitch or less.
As a non-American company that exports components from the U.S., ASML is subject to these rules. However, in the event that it is no longer able to sell advanced equipment to Chinese customers, the Dutch firm may consider releasing a limited version of its Twinscan NXT:1980Di scanner to meet the needs of local firms.
The Twinscan NXT:1980Di Immersion Lithography Tool
Originally released in 2016, the Twinscan NXT:1980Di played a significant role in the development of TSMC’s 7nm-class process technology. With a resolution capability of <38 nm, the scanner has proven to be capable of meeting the demands of advanced nodes.
A recent DigiTimes report suggests that the device may, in fact, be used to enable companies like SMIC and Hua Hong to produce chips on 28nm-class nodes and thicker, but not on more advanced nodes. However, given that a significant portion of SMIC’s revenue comes from these thicker production nodes, it’s likely that Chinese companies would still be interested in obtaining these tools.
If such a move were to be made, it would prevent Chinese chipmakers from creating sub-28nm process technology. By modifying the device and increasing its minimum supported resolution, ASML would prevent the Twinscan NXT:1980Di from being used for more advanced nodes.
However, given that these companies are still interested in utilizing these production nodes, it’s likely that they would still be interested in obtaining these tools. In addition, the latest Dutch export rules require ASML to obtain an export license to sell its Twinscan NXT:2000i scanners to Chinese companies, even though the 2000i has a numerical aperture of 1.55 and a resolution capability of <25 nm.
While ASML has yet to officially create a limited version of the Twinscan NXT, if the export regulations continue to restrict sales of advanced technologies to China, it’s likely that such a move may be considered.
The importance of staying on the cutting edge of technology cannot be stressed enough. By adapting their lithography tools to meet specific export regulations, ASML is aiming to continue providing state-of-the-art technology to its customers.
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